The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Oct. 21, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Michael L. McSwiney, Scappoose, OR (US);
Bhaskar Jyoti Bhuyan, San Jose, CA (US);
Mark Saly, Santa Clara, CA (US);
Drew Phillips, San Jose, CA (US);
Aaron Dangerfield, San Jose, CA (US);
David Thompson, San Jose, CA (US);
Kevin Kashefi, San Ramon, CA (US);
Xiangjin Xie, Fremont, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); B05D 1/00 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76829 (2013.01); B05D 1/60 (2013.01); H01L 21/02118 (2013.01); H01L 21/02205 (2013.01); H01L 21/76846 (2013.01); H01L 21/76877 (2013.01);
Abstract
Methods for selectively depositing on metallic surfaces are disclosed. Some embodiments of the disclosure utilize a hydrocarbon having at least two functional groups selected from alkene, alkyne, ketone, hydroxyl, aldehyde, or combinations thereof to form a self-assembled monolayer (SAM) on metallic surfaces.