The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Jan. 31, 2020
Tokyo Electron Limited, Tokyo, JP;
Ryotaro Takahashi, Oshu, JP;
Takehiro Shindo, Nirasaki, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
There is provided a semiconductor manufacturing apparatus including: a stage including a shaft provided to a surface opposite a mounting surface on which a substrate is mounted, and configured to be rotated by a driving force of a motor using the shaft as a rotation axis; a storage part storing a correction information on a rotational angle of the stage for each number of rotations in a plurality of rotations of the stage, the plurality of rotations corresponding to a cycle; and a rotation control part configured to control the motor based on the correction information and control the rotation of the stage.