The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2024
Filed:
Jun. 22, 2021
Changxin Memory Technologies, Inc., Hefei, CN;
Jian Cheng, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
Embodiments of the present application provide a weighing device that comprises a weighing unit for weighing wafers, a support structure placed on the weighing unit, at least two support platforms disposed on the support structure and each having a bearing surface for supporting peripheral regions of the wafers, and a driving part for driving the support platforms to move on the support structure, so as to adapt the at least two support platforms to bear the differently sized wafers. Since a wafer contacts merely several support platforms, cleanness of the wafer is better maintained during the weighing process; at the same time, the support platforms are enabled to stably bear differently sized wafers through adjustment of movements of the support platforms on the support structure.