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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12084592 B1

PDFFull Text
Date of Patent:
Sep. 10, 2024

Filed:

Oct. 02, 2017

Coating composition for pattern inversion

Applicant:

Nissan Chemical Corporation, Tokyo, JP;

Inventors:

Hiroaki Yaguchi, Toyama, JP;

Makoto Nakajima, Toyama, JP;

Yuki Endo, Toyama, JP;

Wataru Shibayama, Toyama, JP;

Shuhei Shigaki, Toyama, JP;

Assignee:

NISSAN CHEMICAL CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Peter L Vajda

Assistant Examiner:

Jayson D Cosgrove

Int. Cl.
CPC ...
C09D 183/06 (2006.01); B05D 1/32 (2006.01); B05D 1/36 (2006.01); B05D 3/10 (2006.01); B05D 7/00 (2006.01); B05D 7/04 (2006.01); B05D 7/24 (2006.01); C08G 77/38 (2006.01); C09D 183/04 (2006.01); G03F 7/11 (2006.01); G03F 7/16 (2006.01); G03F 7/40 (2006.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
C09D 183/06 (2013.01); B05D 1/32 (2013.01); B05D 1/36 (2013.01); B05D 3/10 (2013.01); B05D 7/00 (2013.01); B05D 7/04 (2013.01); B05D 7/24 (2013.01); C08G 77/38 (2013.01); C09D 183/04 (2013.01); G03F 7/11 (2013.01); G03F 7/16 (2013.01); G03F 7/40 (2013.01); H01L 21/027 (2013.01);
Abstract

A coating composition for pattern inversion that fills a gap in an organic underlayer film pattern formed on a substrate to be processed by transferring a resist pattern to an underlayer and forms a flat polysiloxane film, the coating composition including a polysiloxane obtained by a reaction of an alcohol with a silanol group in a hydrolysis-condensate of a hydrolysable silane having a hydrolysable silane containing in the molecule four hydrolysable groups, in a ratio of 50% by mole to 100% by mole relative to the total amount of silanes. The hydrolysable silane is represented by Formula (1):RSi(R)  Formula (1)and contains 50% by mole to 100% by mole of a hydrolysable silane in which a is 0 and 0% by mole to 50% by mole of a hydrolysable silane in which a is 1 or 2. The alcohol is propylene glycol monomethyl ether, propylene glycol monoethyl ether, or 3-methoxybutanol.

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