The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2024

Filed:

Aug. 23, 2022
Applicants:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Unist (Ulsan National Institute of Science and Technology), Ulsan, KR;

Inventors:

Hyeonjin Shin, Suwon-si, KR;

Minhyun Lee, Suwon-si, KR;

Changseok Lee, Gwacheon-si, KR;

Kyung-Eun Byun, Seongnam-si, KR;

Hyeonsuk Shin, Ulsan, KR;

Seokmo Hong, Ulsan, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 23/532 (2006.01); H01L 23/522 (2006.01); H10B 12/00 (2023.01);
U.S. Cl.
CPC ...
H01L 23/5329 (2013.01); H01L 23/5226 (2013.01); H10B 12/30 (2023.02);
Abstract

A semiconductor memory device and a device including the same are provided. The semiconductor memory device includes word lines extending in a first direction on a semiconductor substrate; bit line structures extending across the word lines in a second direction crossing the first direction; contact pad structures between the word lines and between the bit line structures; and spacers between the bit line structures and the contact pad structures. The spacers include a boron nitride layer.


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