The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2024
Filed:
Jun. 29, 2020
Applicant:
Ebara Corporation, Tokyo, JP;
Inventors:
Assignee:
EBARA CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 49/10 (2006.01); B24B 37/005 (2012.01); G01B 7/06 (2006.01); H01L 21/304 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B24B 49/105 (2013.01); B24B 37/005 (2013.01); G01B 7/105 (2013.01); H01L 21/304 (2013.01); H01L 21/67253 (2013.01); H01L 22/26 (2013.01);
Abstract
The eddy current sensor for measuring the film thickness of a conductive film formed on a substrate includes a core made of a magnetic material that has a base portion, and outer legs provided to the base portion at both end portions in a first direction of the base portion respectively, an excitation coil that is arranged on the core and forms an eddy current in the conductive film, and a detection coil that is arranged on the core and detects the eddy current formed in the conductive film. The length of the base portion in the first direction is not less than the length of the base portion in a second direction that is substantially orthogonal to the first direction.