The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2024
Filed:
Jul. 26, 2022
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Kuan-Ting Pan, Taipei, TW;
Yi-Ruei Jhan, Keelung, TW;
Kuo-Cheng Chiang, Hsinchu County, TW;
Chih-Hao Wang, Hsinchu County, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
According to one example, a method includes forming a first set of fin structures on a substrate, forming a sacrificial material between fin structures within the first set of fin structures, forming a dummy gate with a planar bottom surface over the fin structures and the sacrificial material, forming sidewall structures on the dummy gate, laterally etching the sacrificial material underneath the sidewall structures, depositing a lower sidewall structure where the sacrificial material was removed, removing the dummy gate, removing the sacrificial material, and forming a real gate over the fin structures.