The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2024
Filed:
Sep. 20, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Takami Fukasawa, Yamanashi, JP;
Ryosuke Kanamaru, Yamanashi, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B25J 9/16 (2006.01); B25J 13/08 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67259 (2013.01); B25J 9/1664 (2013.01); B25J 13/089 (2013.01); H01L 21/68707 (2013.01);
Abstract
There is provided a transfer device for transferring a substrate. The transfer device comprises a robot arm having an arm for transferring the substrate and a driving unit for rotating the arm, a first light irradiation unit configured to irradiate light along a first optical path, a first light receiving unit configured to receive the light irradiated from the first light irradiation unit, and a control device configured to control the driving unit so that the arm is rotated across the first optical path.