The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2024
Filed:
Aug. 28, 2020
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Masanori Kobayashi, Tokyo, JP;
Ken Unno, Tokyo, JP;
Tetsuya Sasahara, Tokyo, JP;
Kohei Nawaoka, Tokyo, JP;
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 19/14 (2006.01); G01L 9/00 (2006.01); G01L 9/04 (2006.01);
U.S. Cl.
CPC ...
G01L 19/147 (2013.01); G01L 9/04 (2013.01); G01L 9/0047 (2013.01); G01L 9/0048 (2013.01); G01L 9/0055 (2013.01); G01L 19/143 (2013.01);
Abstract
A sensor element suitable for miniaturization. This pressure sensor element has: a metal plate; an insulating film provided on a first surface, which is one surface of the metal plate, so as to form a covered region in which the first plate is covered and an exposed region in which the first surface is exposed; and a pressure detection circuit formed on the insulating film so as to be insulated from the first surface by means of the insulating film.