The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2024
Filed:
Sep. 09, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventor:
Kiyoshi Mori, Fuchu, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02K 7/14 (2006.01); C23C 16/458 (2006.01); C23C 16/50 (2006.01);
U.S. Cl.
CPC ...
H02K 7/14 (2013.01); C23C 16/4584 (2013.01); C23C 16/50 (2013.01);
Abstract
A rotary mechanism connects a first rotary part and a second rotary part, without using a coupling and while allowing an installation error between the first rotary part and the second rotary part. A rotation body includes a first rotary part and a first fixed part. A flat plate is fixed to the first fixed part of the rotation body and has rigidity in a rotating direction of the first rotary part and flexibility in an axial direction for the rotating direction. A motor includes a second rotary part coaxially fixed to the first rotary part of the rotation body and a second fixed part fixed to the flat plate.