The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 20, 2024

Filed:

Nov. 30, 2021
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Tatsuya Tominari, Plano, TX (US);

Jerald Rock, Lisbon, ME (US);

Hiroshi Yasuda, Plano, TX (US);

Wibo Van Noort, Scarborough, ME (US);

Mattias Dahlstrom, Los Altos, CA (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/737 (2006.01); H01L 29/66 (2006.01);
U.S. Cl.
CPC ...
H01L 29/737 (2013.01); H01L 29/66242 (2013.01);
Abstract

The present disclosure generally relates to dopant profile control in a heterojunction bipolar transistor (HBT). In an example, a semiconductor device structure includes a semiconductor substrate and an HBT. The HBT includes a collector region, a base region, and an emitter region. The base region is disposed on or over the collector region. The emitter region is disposed on or over the base region. The base region is disposed on or over the semiconductor substrate and includes a heteroepitaxial sub-layer. The heteroepitaxial sub-layer is doped with a dopant. A concentration gradient of the dopant increases from a region in a layer adjoining and overlying the heteroepitaxial sub-layer to a peak concentration in the heteroepitaxial sub-layer without decreasing between the region and the peak concentration.


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