The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2024
Filed:
Jul. 28, 2023
Applicant:
Auros Technology, Inc., Hwaseong-si, KR;
Inventors:
Mi Ta Park, San Jose, CA (US);
Jae Jun Lee, Hwaseong-si, KR;
Assignee:
AUROS TECHNOLOGY, INC., Hwaseong-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 4/04 (2006.01); G01N 21/21 (2006.01);
U.S. Cl.
CPC ...
G01J 4/04 (2013.01); G01N 21/21 (2013.01);
Abstract
There is provided a polarization analysis apparatus that adjusts an angle of incidence or a numerical aperture by using an aperture. The apparatus includes: a first aperture that transmits a lighting beam reflected from a sample on a substrate; a second aperture that transmits a lighting beam having passed through the first aperture; and a detector that detects a lighting beam having passed through the second aperture and selects an angle of incidence of the lighting beam and numerical apertures of the first aperture and the second aperture.