The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2024
Filed:
Aug. 26, 2020
Kioxia Corporation, Minato-ku, JP;
Yuta Konno, Kuwana, JP;
Toshihiko Nagase, Saitama, JP;
Atsuko Sakata, Yokkaichi, JP;
Kohei Nagata, Yokkaichi, JP;
Ryohei Kitao, Yokkaichi, JP;
Akifumi Gawase, Kuwana, JP;
Takeshi Iwasaki, Kuwana, JP;
Kioxia Corporation, Minato-ku, JP;
Abstract
A film forming apparatus according to an embodiment includes: a process chamber forming a film on a substrate; an abatement device detoxifying a first exhaust gas exhausted from the process chamber; a first supply pipe for supplying a gas containing water to the process chamber; a first vacuum pump provided in a first flow path of the first exhaust gas between the process chamber and the abatement device; a second vacuum pump provided in the first flow path between the first vacuum pump and the abatement device; and a first detector provided in the first flow path between the second vacuum pump and the abatement device and capable of detecting a hydrogenated gas.