The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2024

Filed:

Nov. 09, 2021
Applicant:

Shanghai Huali Integrated Circuit Corporation, Shanghai, CN;

Inventor:

Yong Li, Shanghai, CN;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/088 (2006.01); H01L 21/8234 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 27/0886 (2013.01); H01L 21/823418 (2013.01); H01L 21/823431 (2013.01); H01L 29/66795 (2013.01); H01L 29/7851 (2013.01);
Abstract

The present disclosure describes a fin field-effect transistor (FinFET) standard cell with double self-aligned contacts. The FinFET standard cell with double self-aligned contacts includes a self-aligned gate contact spanning over a diffusion bonding hole and a self-aligned diffusion bonding hole contact spanning over a gate, and the FinFET device further includes a cap layer between the two self-aligned contacts so as to separate the two self-aligned contacts, thereby further reducing the size of the active fin or a dummy fin so as to further reduce the area of the FinFET standard cell, to prevent a bridge connection between adjacent M0 structures like the M0A and M0P, thereby improving yield of manufacturing.


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