The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2024

Filed:

Aug. 30, 2021
Applicant:

Changxin Memory Technologies, Inc., Hefei, CN;

Inventor:

Jun Wang, Hefei, CN;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G05B 19/418 (2006.01); G05B 23/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67276 (2013.01); G05B 19/4184 (2013.01); G05B 23/0259 (2013.01);
Abstract

A treatment method for an OOC action during a semiconductor production process includes: multiple Out Of Control Action Plan IDs (OCAPID) respectively corresponding to multiple semiconductor production process steps and multiple identified contents in one-to-one correspondence with the multiple OCAPIDs are established, and an OOC action checklist including multiple OOC action check items according to the identified contents is established; it is determined whether the OOC action occurs to a wafer subjected to the current semiconductor production process step, and if the OOC action occurs to the wafer, the current OCAPID corresponding to the current semiconductor production process step is automatically obtained, and the wafer is inspected according to the current identified content corresponding to the current OCAPID.


Find Patent Forward Citations

Wang, Jun. (2024). Treatment method and treatment device for ooc action during semiconductor production process (U.S. Patent No. 12062558). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12062558

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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