The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2024
Filed:
Dec. 08, 2021
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Seung Hoon Oh, Cheonan-si, KR;
Sang Min Lee, Seoul, KR;
Jong Doo Lee, Gyeongju-si, KR;
Jin Mo Jae, Asan-si, KR;
Young Hun Lee, Cheonan-si, KR;
Assignee:
SEMES CO., LTD., Cheonan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16J 15/3204 (2016.01); B08B 7/00 (2006.01);
U.S. Cl.
CPC ...
F16J 15/3204 (2013.01); B08B 7/0021 (2013.01);
Abstract
A sealing member for use in sealing a chamber for treating a substrate, the sealing member inserted in a groove formed in the chamber, includes a bottom part, a top part opposite the bottom part, an inner part connecting a first side of the bottom part to the top part, an outer part opposite the inner part and connecting a second side of the bottom part to the top part, and a recessed portion between the top part and the outer part.