The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2024
Filed:
Sep. 09, 2021
Carl Zeiss Smt Inc., Pleasanton, CA (US);
Thomas Anthony Case, Walnut Creek, CA (US);
Susan Candell, Lafayette, CA (US);
Naomi Kotwal, Dublin, CA (US);
Allen Gu, Pleasanton, CA (US);
Lorenz Lechner, San Ramon, CA (US);
Wayne Broderick, Pleasanton, CA (US);
Carl Zeiss SMT, Inc., Dublin, CA (US);
Abstract
A method images a region of interest of a sample using a tomographic X-ray microscope. The method includes registering a position of the sample. Registering includes: imaging a portion of the sample containing a feature using the microscope, identifying the feature by matching the feature to a pre-recorded feature, and determining a relative position of the feature in relation to the pre-recorded feature. The method also includes navigating a field of view of the microscope over the region of interest based on the registered position of the sample, and imaging the region of interest using the microscope.