The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 30, 2024

Filed:

Jan. 04, 2021
Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Yoshimasa Kojima, Tokyo, JP;

Jun Nakama, Tokyo, JP;

Satoshi Hanajima, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B23K 26/08 (2014.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68764 (2013.01); H01L 21/67259 (2013.01); B23K 26/0823 (2013.01); B23K 26/0853 (2013.01);
Abstract

A method of using a processing apparatus that includes a holding unit with a rotatable chuck table for holding a workpiece; a processing unit for processing the workpiece; a camera for imaging the workpiece that is movable in an indexing feed direction; and a control unit for controlling the components. The method includes forming a linear processed mark in the workpiece, and then moving the chuck table to an imaging zone, where the camera images the processed mark. The method further includes calculating correction values or a correction angle, and carrying out processing feed of the chuck table in the imaging zone under a condition in which the camera has been corrected in position in the Y-axis direction based on the correction values or the chuck table has been rotated by the correction angle.


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