The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2024
Filed:
Jun. 27, 2019
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Patriek Adrianus Alphonsus Maria Bruurs, Baarle-Nassau, NL;
Dennis Herman Caspar Van Banning, Best, NL;
Jan-Gerard Cornelis Van Der Toorn, Eindhoven, NL;
Edwin Cornelis Kadijk, Eindhoven, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G01K 1/14 (2021.01); G01K 11/125 (2021.01); H01J 37/20 (2006.01); H01J 37/244 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67248 (2013.01); G01K 1/14 (2013.01); G01K 11/125 (2013.01); H01J 37/20 (2013.01); H01J 37/244 (2013.01); H01L 21/68 (2013.01); H01J 2237/20228 (2013.01); H01J 2237/20235 (2013.01);
Abstract
A stage apparatus including: an object table configured to hold an object; a positioning device configured to position the object table and the object held by the object table; and a remote temperature sensor configured to measure a temperature of the object table and/or the object, wherein the remote temperature sensor comprises a passive temperature sensing element.