The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2024
Filed:
Jun. 08, 2021
Changxin Memory Technologies, Inc., Hefei, CN;
Zhiguo Wang, Hefei, CN;
Lei Wang, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
The present disclosure relates to the field of semiconductor technology, and proposes a material supply system and a material supply method. The material supply system includes a storage device, a gas channel and a material channel, wherein the storage device comprises a first storage tank and a second storage tank that are independently disposed, and both the first storage tank and the second storage tank are used to store a supply material; the gas channel is connected to the first storage tank, the gas channel is connected to the second storage tank, and the gas channel is used to feed gas; and the material channel is connected to the first storage tank or the second storage tank in a switchable manner to receive the supply material discharged from the first storage tank or the second storage tank.