The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2024
Filed:
Nov. 08, 2021
Advanced Micro-fabrication Equipment Inc. China, Shanghai, CN;
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA, Shanghai, CN;
Abstract
Disclosed are a multi-zone heating apparatus, a bottom electrode assembly, a plasma processing apparatus, and a temperature adjusting method, wherein the multi-zone heating apparatus includes: a plurality of foil heaters; a plurality of switches, each switch being connected with a foil heater to form a heating unit; two ends of the plurality of heating units are connected to a ground bus and a power supply bus, respectively; a plurality of driving wires, each driving wire being connected with a switch and configured to transmit a control signal of the duty cycle of the switch, the switches being configured to independently control the operating time of the connected foil heaters based on the control signal. The multi-zone heating apparatus can be integrated between the electrostatic chuck and the base in the plasma processing apparatus and can reduce use of external conductive wires, thereby reducing the demand for filters.