The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2024
Filed:
Sep. 04, 2019
Hitachi High-tech Corporation, Tokyo, JP;
Hiroyuki Chiba, Tokyo, JP;
Wei Chean Tan, Tokyo, JP;
Ryo Komatsuzaki, Tokyo, JP;
Hirofumi Sato, Tokyo, JP;
Hitachi High-Tech Corporation, Tokyo, JP;
Abstract
A charged particle beam deviceincludes: an irradiation unitconfigured to irradiate a sample S with a charged particle beam; a particle detection unitconfigured to detect a particle caused by the irradiation of the sample with the charged particle beam; and a control unitconfigured to generate an image of the sample based on an output from the particle detection unit, wherein the control unitinputs the image of the sample S into models Mand Mfor detecting a first structureand a second structure, acquires a first detection result related to the first structureand a second detection result related to the second structurefrom the models Mand M, determines locations or regions of the first structureand the second structurebased on the first detection result and the second detection result, and outputs an integration result imagerepresenting the location or the region of the first structureand the location or the region of the second structure