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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12044966 B1

PDFFull Text
Date of Patent:
Jul. 23, 2024

Filed:

Jul. 20, 2023

Photoresist for semiconductor fabrication

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Chih-Cheng Liu, Hsinchu, TW;

Yi-Chen Kuo, Hsinchu, TW;

Yen-Yu Chen, Hsinchu, TW;

Jr-Hung Li, Hsinchu County, TW;

Chi-Ming Yang, Hsinchu, TW;

Tze-Liang Lee, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;

Attorney:

HAYNES AND BOONE, LLP

Primary Examiner:

John S Chu

Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07F 5/00 (2006.01); C07F 7/22 (2006.01); C07F 9/90 (2006.01); C07F 9/92 (2006.01); C07F 9/94 (2006.01); C07F 11/00 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0042 (2013.01); C07F 5/00 (2013.01); C07F 5/003 (2013.01); C07F 7/2284 (2013.01); C07F 9/902 (2013.01); C07F 9/92 (2013.01); C07F 9/94 (2013.01); C07F 11/00 (2013.01); G03F 7/2004 (2013.01);
Abstract

An organometallic precursor for extreme ultraviolet (EUV) lithography is provided. An organometallic precursor includes an aromatic di-dentate ligand, a transition metal coordinated to the aromatic di-dentate ligand, and an extreme ultraviolet (EUV) cleavable ligand coordinated to the transition metal. The aromatic di-dentate ligand includes a plurality of pyrazine molecules.

Find Patent Forward Citations

Liu, Chih-Cheng. (2024). Photoresist for semiconductor fabrication (U.S. Patent No. 12044966). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12044966

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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