The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2024
Filed:
Jul. 28, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Amita Joshi, Fremont, CA (US);
Ian Matthew McMackin, Mountain View, CA (US);
Rami Hourani, Santa Clara, CA (US);
Yingdong Luo, San Jose, CA (US);
Sivapackia Ganapathiappan, Los Altos, CA (US);
Ludovic Godet, Sunnyvale, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B29C 59/00 (2006.01); B29C 71/02 (2006.01); B29C 71/04 (2006.01); C01G 23/04 (2006.01); C01G 25/02 (2006.01); C01G 33/00 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G03F 7/0002 (2013.01); B29C 59/005 (2013.01); B29C 71/02 (2013.01); B29C 71/04 (2013.01); C01G 23/043 (2013.01); C01G 25/02 (2013.01); C01G 33/00 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); C01P 2004/64 (2013.01);
Abstract
Embodiments of the present disclosure generally relate to imprint compositions and materials and related processes useful for nanoimprint lithography (NIL). In one or more embodiments, an imprint composition contains one or more types of nanoparticles, one or more surface ligands, one or more solvents, one or more additives, and one or more acrylates.