The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2024
Filed:
Jan. 04, 2022
Kla Corporation, Milpitas, CA (US);
Bruce Borchers, Scotts Valley, CA (US);
KLA Corporation, Milpitas, CA (US);
Abstract
A system and method for rotary motion with vacuum sealing is provided. The system includes a vacuum chamber, a component mount disposed in the vacuum chamber, and a base. A bellows is disposed between the base and the component mount, and the bellows provides a seal between the base and the component mount. The bellows, the base, and the component mount define an actuator compartment therebetween. An actuator is disposed in the actuator compartment. The actuator is configured to rotate the component mount relative to the base in order to align a component disposed on the component mount. Rotation of the component mount relative to the base causes torsional elastic deformation of the bellows.