The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2024

Filed:

May. 23, 2019
Applicant:

Central Glass Company, Limited, Ube, JP;

Inventors:

Yuzuru Kaneko, Saitama, JP;

Takashi Aoki, Saitama, JP;

Yusuke Nomura, Saitama, JP;

Keiko Sasaki, Saitama, JP;

Asuka Sano, Saitama, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/38 (2006.01); C08F 220/22 (2006.01); C08F 236/16 (2006.01); G03F 7/00 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01); H01L 21/02 (2006.01); H01L 21/3065 (2006.01); H01L 33/00 (2010.01); H01L 33/44 (2010.01); H10K 50/115 (2023.01); H10K 71/00 (2023.01); H10K 71/13 (2023.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/38 (2013.01); C08F 220/22 (2013.01); C08F 236/16 (2013.01); G03F 7/0002 (2013.01); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01); H01L 21/02046 (2013.01); H01L 21/3065 (2013.01); H01L 33/005 (2013.01); H01L 33/44 (2013.01); H10K 50/115 (2023.02); H10K 71/00 (2023.02); H10K 71/135 (2023.02); G03F 7/2006 (2013.01); H01L 2933/0025 (2013.01);
Abstract

The production method of a substrate with a patterned film according to the present disclosure includes: a cleaning step of performing UV/ozone cleaning or oxygen plasma cleaning on a substrate with a patterned film including a substrate and a patterned film on the substrate, to obtain a first substrate with a patterned film; and a heating step of heating the first substrate with a patterned film to obtain a second substrate with a patterned film, wherein the patterned film of the first substrate with a patterned film has a contact angle decreased in the cleaning step, and the patterned film of the second substrate with a patterned film has a contact angle recovered in the heating step.


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