The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2024
Filed:
Dec. 15, 2021
Applied Materials, Inc., Santa Clara, CA (US);
National University of Singapore, Singapore, SG;
Vicknesh Sahmuganathan, Singapore, SG;
Jiteng Gu, Singapore, SG;
Zhongxin Chen, Singapore, SG;
Kian Ping Loh, Singapore, SG;
John Sudijono, Singapore, SG;
Haisen Xu, Guangdong Province, CN;
Sze Chieh Tan, Singapore, SG;
Yuanxing Han, Singapore, SG;
Jiecong Tang, Singapore, SG;
Eswaranand Venkatasubramanian, Santa Clara, CA (US);
Abhijit Basu Mallick, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Apparatuses and methods for forming a film on a substrate are described. The film is formed on the substrate by depositing an adamantane monomer and an initiator on the substrate to form a polymerizable seed layer and curing the polymerizable seed layer to form a polyadamantane layer.