The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 2024

Filed:

Feb. 24, 2021
Applicant:

Yangtze Memory Technologies Co., Ltd., Wuhan, CN;

Inventors:

He Chen, Wuhan, CN;

Liang Xiao, Wuhan, CN;

Yongqing Wang, Wuhan, CN;

Shu Wu, Wuhan, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/00 (2006.01); H01L 25/00 (2006.01); H01L 25/065 (2023.01); H10B 41/27 (2023.01); H10B 43/27 (2023.01);
U.S. Cl.
CPC ...
H01L 24/08 (2013.01); H01L 24/80 (2013.01); H01L 25/0657 (2013.01); H01L 25/50 (2013.01); H10B 41/27 (2023.02); H10B 43/27 (2023.02); H01L 2224/08145 (2013.01); H01L 2224/80895 (2013.01); H01L 2224/80896 (2013.01); H01L 2924/1431 (2013.01); H01L 2924/14511 (2013.01);
Abstract

Three-dimensional (3D) NAND memory devices and methods are provided. In one aspect, a fabrication method includes preparing a stacked device having a first array device and a second array device, forming an opening on a back side of the second array device, and forming one or more contact pads in the opening. The first array device includes first front pads on a face side of the first array device and first back pads on a back side of the first array device. The second array device includes second front pads on a face side of the second array device and bonded with the first back pads. The one or more contact pads are disposed at a level proximate to the second front pads with respect to the first array device.


Find Patent Forward Citations

Loading…