The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2024
Filed:
Feb. 16, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Bhaskar Jyoti Bhuyan, San Jose, CA (US);
Mark Saly, Santa Clara, CA (US);
Lakmal C. Kalutarage, San Jose, CA (US);
Thomas Knisley, Livonia, MI (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/18 (2006.01); C07F 7/00 (2006.01); C07F 7/02 (2006.01); C07F 7/22 (2006.01); C07F 7/30 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45553 (2013.01); C07F 7/003 (2013.01); C07F 7/025 (2013.01); C07F 7/2224 (2013.01); C07F 7/2284 (2013.01); C07F 7/30 (2013.01); C23C 16/18 (2013.01); C23C 16/45534 (2013.01);
Abstract
Methods of forming a metal film having a metal halide with a reducing agent are disclosed. The reducing agent, the reducing agent includes a group IV element containing heterocyclic compound, a radical initiator, an alkly alane, a diborene species and/or a Sn(II) compound.