The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2024

Filed:

Apr. 27, 2022
Applicant:

Unisantis Electronics Singapore Pte. Ltd., Singapore, SG;

Inventors:

Fujio Masuoka, Tokyo, JP;

Nozomu Harada, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10B 99/00 (2023.01); H10B 10/00 (2023.01);
U.S. Cl.
CPC ...
H10B 10/12 (2023.02); H10B 99/00 (2023.02);
Abstract

A bottom portion of a Ta pillar serving as a contact portion is connected to an Nlayer and a Player, and a gate HfOlayer is connected to side surfaces of Si pillars and a Ta pillar serving as a contact portion and an upper surface of a SiOlayer between the Si pillars and the Ta pillar serving as the contact portion. Gate TiN layers are provided on a side surface of the gate HfOlayer surrounding the Si pillars. Midpoints of the Si pillars and the Ta pillar serving as the contact portion are on one first line in plan view.


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