The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2024
Filed:
Dec. 17, 2019
Applicant:
Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;
Inventors:
Wen-Zhan Zhou, Zhubei, TW;
Heng-Jen Lee, Baoshan Township, TW;
Hsu-Yuan Liu, Zhudong Township, TW;
Yu-Chen Huang, Toufen Township, TW;
Cheng-Han Wu, Taichung, TW;
Shih-Che Wang, Hsin-Chu, TW;
Ho-Yung David Hwang, Chu Pei, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/16 (2006.01); B67D 7/02 (2010.01); B67D 7/36 (2010.01); B67D 7/78 (2010.01); H01L 21/027 (2006.01);
U.S. Cl.
CPC ...
G03F 7/16 (2013.01); B67D 7/0294 (2013.01); B67D 7/36 (2013.01); B67D 7/78 (2013.01); H01L 21/0274 (2013.01); Y10T 137/0318 (2015.04); Y10T 137/86187 (2015.04);
Abstract
A method of supplying a chemical solution to a photolithography system. The chemical solution is pumped from a variable-volume buffer tank. The pumped chemical solution is dispensed in a spin-coater. The variable-volume buffer tank is refilled by emptying a storage container filled with the chemical solution into the variable-volume buffer tank.