The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2024
Filed:
Jan. 18, 2019
Applicant:
Ev Group E. Thallner Gmbh, St. Florian am Inn, AT;
Inventors:
Dominik Zinner, Zell an der Pram, AT;
Jürgen Mallinger, Senftenbach, AT;
Thomas Plach, St. Florian am Inn, AT;
Boris Povazay, Vienna, AT;
Harald Rohringer, Tumeltsham, AT;
Jürgen Markus Süss, Rainbach b. Schärding, AT;
Assignee:
EV GROUP E. THALLNER GMBH, St. Florian Am Inn, AT;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01); G01B 11/16 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01B 11/14 (2013.01); G01B 11/16 (2013.01); H01L 21/67288 (2013.01); H01L 22/12 (2013.01);
Abstract
A measuring device for determining a course of a bonding wave in a gap between a first substrate and a second substrate, and a method for determining a course of a bonding wave in a gap between a first substrate and a second substrate.