The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2024
Filed:
Nov. 12, 2021
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Makoto Kato, Miyagi, JP;
Sho Murano, Miyagi, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01);
Abstract
A temperature regulator includes a first member, a channel, and a cavity. The first member has a first surface that is subjected to temperature control. The channel is along the first surface in the first member, and refrigerant flows in the channel. The cavity is provided in the first member adjacently to a flow rate change region of the channel. A flow rate of refrigerant in the flow rate change region is higher than a flow rate of refrigerant in another region of the channel.