The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2024
Filed:
Jan. 19, 2022
Tokyo Electron Limited, Tokyo, JP;
Eiichi Komori, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A powder transfer apparatus includes: a powder transfer pipe connecting a powder raw material supply source to a vaporizer and configured to supply a powder to the vaporizer from the powder raw material supply source; a first purge gas supply pipe connecting a buffer tank to the powder transfer pipe at a first branch point and configured to supply a purge gas from the buffer tank to the powder transfer pipe; a first valve that is closer to the powder raw material supply source than the first branch point is; a second valve that is closer to the vaporizer than the first branch point is, an opening degree of the second valve being adjustable; a first purge gas valve provided on the first purge gas supply pipe; and a controller configured to control opening and closing of the first valve, the second valve, and the first purge gas valve.