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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12014912 B1

PDFFull Text
Date of Patent:
Jun. 18, 2024

Filed:

May. 05, 2021

Apparatus and method for physical vapor deposition

Applicant:

Taiwan Semiconductor Manufacturing Company Limited, Hsin-Chu, TW;

Inventors:

Yu-Young Wang, New Taipei, TW;

Wen-Cheng Yang, Hsinchu, TW;

Chyi-Tsong Ni, Hsin-Chu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED, Hsin-Chu, TW;

Attorney:

Cooper Legal Group, LLC

Primary Examiner:

Michael A Band

Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/35 (2006.01); H01F 7/20 (2006.01); H01F 27/24 (2006.01); H01F 27/28 (2006.01); H01F 27/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3458 (2013.01); C23C 14/35 (2013.01); H01F 7/20 (2013.01); H01F 27/24 (2013.01); H01F 27/28 (2013.01); H01F 27/327 (2013.01); H01J 37/3405 (2013.01);
Abstract

An apparatus and method for physical vapor deposition includes a magnetron having a plurality of electromagnets disposed between a base and a magnetic conductive plate. The magnetron includes a plurality of individually controlled electromagnets between a base and an electromagnetic plate. The magnetron controls the polarity and strength of current supplied to the respective electromagnets to generate magnetic fields that confine electrons to areas near a target material within the deposition chamber.

Find Patent Forward Citations

Wang, Yu-Young. (2024). Apparatus and method for physical vapor deposition (U.S. Patent No. 12014912). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12014912

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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