The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 18, 2024

Filed:

Oct. 11, 2022
Applicant:

Recarbon, Inc., Santa Clara, CA (US);

Inventors:

Curtis Peter Tom, San Mateo, CA (US);

Fei Xie, Sunnyvale, CA (US);

Wei Li, San Jose, CA (US);

Stefan Andrew McClelland, San Jose, CA (US);

Assignee:

ReCarbon, Inc., Santa Clara, CA (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); B01J 19/12 (2006.01); C23C 16/511 (2006.01); G01J 1/04 (2006.01); G01J 1/42 (2006.01); G01J 5/00 (2022.01); H05H 1/46 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32229 (2013.01); B01J 19/12 (2013.01); C23C 16/511 (2013.01); G01J 1/0425 (2013.01); G01J 1/0492 (2013.01); G01J 1/4228 (2013.01); G01J 1/429 (2013.01); G01J 5/0018 (2013.01); H01J 37/32449 (2013.01); H01J 37/32623 (2013.01); H01J 37/32844 (2013.01); H01J 37/32972 (2013.01); H05H 1/46 (2013.01); F01N 2240/28 (2013.01); H01J 37/32192 (2013.01); H01J 37/32513 (2013.01); H01J 2237/1502 (2013.01); H05H 1/4622 (2021.05);
Abstract

The present invention provides a plasma generating system that includes: a waveguide; a plasma cavity coupled to the waveguide and configured to generate a plasma therewithin by use of microwave energy; a hollow cylinder protruding from a wall of the waveguide and having a bottom cap that has an aperture; a detection unit for receiving the light emitted by the plasma through the aperture and configured to measure intensities of the light in an ultraviolet (UV) range and an infrared (IR) range; and a controller for controlling the detection unit.


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