The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2024
Filed:
Mar. 23, 2021
Applied Materials, Inc., Santa Clara, CA (US);
Yuxing Zhang, Santa Clara, CA (US);
Tuan Anh Nguyen, San Jose, CA (US);
Amit Kumar Bansal, Milpitas, CA (US);
Nitin Pathak, Mumbai, IN;
Saket Rathi, Santa Clara, CA (US);
Thomas Rubio, Santa Clara, CA (US);
Udit S. Kotagi, Bengaluru, IN;
Badri N. Ramamurthi, Los Gatos, CA (US);
Dharma Ratnam Srichurnam, Bengaluru, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present disclosure relates to a cleaning assemblies, components thereof, and methods associated therewith for substrate processing chambers. In one example, a cleaning assembly for a substrate processing chamber includes a distribution ring. The distribution ring comprises a body with an inlet and an outlet. The outlet is fluidly coupled to an internal volume of the substrate processing chamber via a sidewall of the substrate processing chamber. The cleaning assembly includes a cleaning conduit configured to fluidly couple a gas manifold to the distribution ring for diverting a first portion of cleaning fluid from the gas manifold to the distribution ring.