The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 11, 2024

Filed:

Jan. 21, 2020
Applicant:

Ebara Corporation, Tokyo, JP;

Inventors:

Masayuki Fujiki, Tokyo, JP;

Nobuhito Kiyosawa, Tokyo, JP;

Kei Kitamura, Tokyo, JP;

Assignee:

EBARA CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67219 (2013.01); G05B 19/41835 (2013.01); G05B 2219/45031 (2013.01);
Abstract

A control system which can efficiently perform an operational adjustment work and can safely adjust a unit is disclosed. The control systemincludes a controllerand a plurality of terminal devices connectable to the controller. The controllerincludes a storage devicestoring a processing program, and a processorfor performing operations and calculations based on the processing program. The processing program including instructions to give an access operation right, which permits access by an adjustment target unit to an access target unit, to a target terminal device which is one of the terminal devices in response to a request for the access operation right, transmitted from the target terminal device to the controller, on the condition that an exclusive operation right for the access target unit has not been given to any of the terminal devices.


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