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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12009229 B1

PDFFull Text
Date of Patent:
Jun. 11, 2024

Filed:

Aug. 26, 2020

Laser processing apparatus

Applicant:

Disco Corporation, Tokyo, JP;

Inventors:

Hiroki Uryu, Tokyo, JP;

Seiji Miura, Tokyo, JP;

Haruhiko Asahi, Tokyo, JP;

Hisatoshi Fujisawa, Tokyo, JP;

Yoshiki Kobayashi, Tokyo, JP;

Hidenori Akamatsu, Tokyo, JP;

Assignee:

DISCO CORPORATION, Tokyo, JP;

Attorney:

Greer, Burns & Crain, Ltd.

Primary Examiner:

Nahida Sultana

Int. Cl.
CPC ...
B23K 26/08 (2014.01); B23K 26/03 (2006.01); B23K 26/06 (2014.01); B23K 26/0622 (2014.01); B23K 26/53 (2014.01); B23K 26/70 (2014.01); G01J 1/44 (2006.01); G05B 19/4155 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01); B23K 103/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67092 (2013.01); B23K 26/032 (2013.01); B23K 26/0622 (2015.10); B23K 26/0643 (2013.01); B23K 26/0648 (2013.01); B23K 26/0665 (2013.01); B23K 26/0853 (2013.01); B23K 26/53 (2015.10); B23K 26/705 (2015.10); G01J 1/44 (2013.01); G05B 19/4155 (2013.01); H01L 21/67115 (2013.01); H01L 21/67253 (2013.01); H01L 21/6836 (2013.01); B23K 2103/56 (2018.08); G05B 2219/34031 (2013.01); H01L 2221/68327 (2013.01);
Abstract

A laser beam irradiating unit of a laser processing apparatus includes a laser oscillator, a mirror configured to reflect a laser beam emitted from the laser oscillator and propagate the laser beam to a processing point, a power measuring unit configured to measure power of leakage light of the laser beam transmitted without being reflected by the mirror, and a condensing lens configured to condense the laser beam propagated by the mirror and irradiate a workpiece with the condensed laser beam. The control unit measures the power of the leakage light of the laser beam by the power measuring unit while irradiating the workpiece with the laser beam.

Find Patent Forward Citations

Uryu, Hiroki. (2024). Laser processing apparatus (U.S. Patent No. 12009229). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12009229

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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