The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Feb. 06, 2019
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jun Ma, Milpitas, CA (US);
Chen-An Chen, San Jose, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); C23C 16/4581 (2013.01); C23C 16/4586 (2013.01); H01L 21/67103 (2013.01); H01L 21/67248 (2013.01); H01L 21/67253 (2013.01); H01L 21/68735 (2013.01); H01L 21/68792 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/3341 (2013.01);
Abstract
A pedestal for a semiconductor processing chamber is provided. The pedestal includes a first body comprising a ceramic material, wherein a plurality of heater elements are encapsulated within the first body, and a second body comprising a ceramic material, wherein one or more continuously curved grooves are formed in one or more surfaces of the second body. Additionally, the first body is coupled to the second body and encloses the grooves.
Ma, Jun. (2024). Semiconductor processing apparatus having improved temperature control (U.S. Patent No. 12009185). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12009185
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile