The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Mar. 25, 2021
Changxin Memory Technologies, Inc., Anhui, CN;
Yan Zhang, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Anhui, CN;
Abstract
A mark detection method includes: acquiring on-off information of marks on a photomask to be manufactured; comparing the on-off information with preset on-off information to determine whether the on-off information is consistent with the preset on-off information; and, correcting the on-off information according to the preset on-off information when it is determined that the on-off information is inconsistent with the preset on-off information. The mark detection method and apparatus and the computer-readable storage medium according to the present disclosure can automatically detect whether the on-off of marks is accurate, thereby improving the detection accuracy and reducing labor cost.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile