The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Dec. 08, 2022
Tokyo Electron Limited, Tokyo, JP;
Hiroki Sakurai, Koshi, JP;
Nobuhiro Ogata, Koshi, JP;
Daisuke Goto, Koshi, JP;
Kanta Mori, Koshi, JP;
Kenji Yada, Koshi, JP;
Yusuke Hashimoto, Koshi, JP;
Shoki Mizuguchi, Koshi, JP;
Yenrui Hsu, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A nozzle that mixes fluid containing steam or mist of pressurized pure water and processing liquid containing at least sulfuric acid and ejects mixed fluid of the fluid and the processing liquid, the nozzle comprising: at least one first ejection port ejecting the fluid; at least one second ejection port ejecting the processing liquid; and at least one lead-out path being in fluid communication with the at least one first ejection port and the at least one second ejection port and leading out the mixed fluid of the fluid ejected from the at least one first ejection port and the processing liquid ejected from the at least one second ejection port, wherein the at least one first ejection port or the at least one second ejection port is arranged to be directed to position deviated from central axis of the at least one lead-out path in a plan view.