The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Nov. 08, 2019
Forschungszentrum Juelich Gmbh, Juelich, DE;
Bert Voigtlaender, Juelich, DE;
Vasily Cheperanov, Juelich, DE;
FORSCHUNGSZENTRUM JUELICH GMBH, Juelich, DE;
Abstract
A method is provided for electrically examining electronic components of an integrated circuit including a target region to be examined in which electronic components with contact points are located and further including a remaining, non-target region. The method includes performing an examination with a combined SEM/AFM nanoprobe. The examination includes imaging at least a portion of the non-target region with the scanning electron microscope part of the SEM/AFM nanoprobe in a first step, imaging at least a portion of the target region only with the atomic force microscope part of the SEM/AFM nanoprobe in a subsequent step, and recording, in a further subsequent step, current/voltage curves as characteristic electrical curves at the contact points with the nanoprobe, or performing a conductive AFM technique.