The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Sep. 09, 2021
Applicant:
Carl Zeiss Smt Inc., Pleasanton, CA (US);
Inventors:
Thomas Anthony Case, Walnut Creek, CA (US);
Susan Candell, Lafayette, CA (US);
Naomi Kotwal, Dublin, CA (US);
Allen Gu, Pleasanton, CA (US);
Zheren Wu, San Jose, CA (US);
Wayne Broderick, Pleasanton, CA (US);
Assignee:
Carl Zeiss SMT Inc., Pleasanton, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/04 (2018.01); G01N 23/083 (2018.01);
U.S. Cl.
CPC ...
G01N 23/04 (2013.01); G01N 23/083 (2013.01); G01N 2223/307 (2013.01); G01N 2223/309 (2013.01); G01N 2223/6113 (2013.01); G01N 2223/6462 (2013.01);
Abstract
A sample holder for holding a sample during an X-ray imaging process includes a sample placement surface on which the sample is placed for positioning the sample in a depth direction of the sample holder. The sample holder also includes a first alignment portion for aligning the sample in a width direction of the sample holder, and a second alignment portion for aligning the sample in a height direction of the sample holder.