The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 11, 2024

Filed:

Oct. 22, 2019
Applicant:

Lg Chem, Ltd., Seoul, KR;

Inventors:

Sung Jin Shin, Daejeon, KR;

Jang Yeon Hwang, Daejeon, KR;

Hee Joon Jeong, Daejeon, KR;

Bo Ra Park, Daejeon, KR;

Hee Wang Yang, Daejeon, KR;

Assignee:

LG CHEM, LTD., Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 18/12 (2006.01); C08J 7/048 (2020.01); C08J 7/06 (2006.01); C23C 16/34 (2006.01); C23C 18/14 (2006.01); C23C 18/04 (2006.01); H10K 50/844 (2023.01);
U.S. Cl.
CPC ...
C23C 18/122 (2013.01); C08J 7/048 (2020.01); C08J 7/06 (2013.01); C23C 16/34 (2013.01); C23C 18/1233 (2013.01); C23C 18/14 (2013.01); C23C 18/04 (2013.01); H10K 50/844 (2023.02);
Abstract

Provided is a barrier film comprising a base layer, and an inorganic layer including Si, N, and O, and including a first region and a second region, which have different elemental contents (atomic %) of Si, N, and O from each other as measured by XPS, wherein the film has a water vapor transmission rate of 5.0×10g/m·day or less as measured under conditions of a temperature of 38° C. and 100% relative humidity after being stored at 85° C. and 85% relative humidity conditions for 250 hours, or wherein the inorganic layer has a compactness expressed through an etching rate of 0.17 nm/s in the thickness direction for an Ar ion etching condition to etch TaOat a rate of 0.09 nm/s. The barrier film has excellent barrier properties and optical properties and can be used for electronic products that are sensitive to moisture and the like.


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Shin, Sung. (2024). Barrier film (U.S. Patent No. 12006575). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12006575

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