The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Mar. 14, 2019
Applicant:
Obsidian Sensors, Inc., San Diego, CA (US);
Inventors:
John Hong, La Jolla, CA (US);
Tallis Chang, La Jolla, CA (US);
Edward Chan, La Jolla, CA (US);
Bing Wen, La Jolla, CA (US);
Yaoling Pan, La Jolla, CA (US);
Sean Andrews, San Diego, CA (US);
Assignee:
Obsidian Sensors, Inc., San Diego, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01J 5/20 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00595 (2013.01); B81B 3/0081 (2013.01); B81C 1/0069 (2013.01); G01J 5/20 (2013.01); B81B 2201/0207 (2013.01); B81B 2203/019 (2013.01); B81C 2201/0105 (2013.01); B81C 2201/014 (2013.01);
Abstract
A method of manufacturing an electromechanical systems structure includes manufacturing sub-micron structural features. In some embodiments, the structural features are less than the lithographic limit of a lithography process.