The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2024
Filed:
Dec. 07, 2020
Applicant:
Asm Ip Holding B.v., Almere, NL;
Inventors:
Yukihiro Mori, Machida, JP;
Melvin Verbaas, Lelystad, NL;
Assignee:
ASM IP Holding B.V., Almere, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01); C23C 16/50 (2006.01); C23C 16/509 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01J 37/32724 (2013.01); C23C 16/45544 (2013.01); C23C 16/4583 (2013.01); C23C 16/4586 (2013.01); C23C 16/46 (2013.01); C23C 16/463 (2013.01); C23C 16/50 (2013.01); C23C 16/509 (2013.01); C23C 16/52 (2013.01); H01J 37/32009 (2013.01); H01J 37/3244 (2013.01); H01J 37/32715 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/6719 (2013.01); H01L 21/67248 (2013.01); C23C 16/4412 (2013.01); H01J 2237/3321 (2013.01); H01J 2237/334 (2013.01);
Abstract
A susceptor includes a plate part, a first heater for heating a first portion of the plate part, a second heater for heating a second portion of the plate part, and a heat insulating portion for thermally insulating the first portion and the second portion from each other on an upper surface side of the plate part.