The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2024

Filed:

Apr. 23, 2021
Applicants:

Stmicroelectronics S.r.l., Agrate Brianza, IT;

Stmicroelectronics Ltd, Netanya, IL;

Inventors:

Davide Terzi, Bergamo, IT;

Gianluca Mendicino, Legnano, IT;

Dadi Sharon, Givat Ada, IT;

Assignees:

STMicroelectronics S.r.l., Agrate Brianza, IT;

STMicroelectronics Ltd, Netanya, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/10 (2006.01); B81B 3/00 (2006.01); G02B 26/08 (2006.01); G09G 3/34 (2006.01); H02N 2/10 (2006.01); H02N 2/14 (2006.01); H03H 9/15 (2006.01); H10N 30/20 (2023.01); H10N 30/853 (2023.01);
U.S. Cl.
CPC ...
G02B 26/101 (2013.01); B81B 3/0021 (2013.01); G02B 26/0858 (2013.01); G09G 3/346 (2013.01); H02N 2/103 (2013.01); H02N 2/145 (2013.01); H03H 9/15 (2013.01); H10N 30/204 (2023.02); B81B 2201/032 (2013.01); H10N 30/8554 (2023.02);
Abstract

Disclosed herein is a microelectromechanical (MEMS) device, including a rotor and a first piezoelectric actuator mechanically coupled to the rotor. The first piezoelectric actuator is electrically coupled between a first signal node and a common voltage node. A second piezoelectric actuator is mechanically coupled to the rotor, and is electrically coupled between a second signal node and the common voltage node. Control circuitry includes a drive circuit configured to drive the first and second piezoelectric actuators, a sense circuit configured to process sense signals generated by the first and second pizeoelectric actuators, and a multiplexing circuit. The multiplexing circuit is configured to alternate between connecting the drive circuit to the first piezoelectric actuator while connecting the sense circuit to the second piezoelectric actuator, and connecting the drive circuit to the second piezoelectric actuator while connecting the sense circuit to the first piezoelectric actuator.


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