The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2024
Filed:
Feb. 20, 2023
Applied Materials, Inc., Santa Clara, CA (US);
Sarah Michelle Bobek, Sunnyvale, CA (US);
Venkata Sharat Chandra Parimi, Santa Clara, CA (US);
Prashant Kumar Kulshreshtha, San Jose, CA (US);
Vinay K. Prabhakar, Cupertino, CA (US);
Kwangduk Douglas Lee, Redwood City, CA (US);
Sungwon Ha, Palo Alto, CA (US);
Jian Li, Fremont, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Aspects of the present disclosure relate generally to pedestals, components thereof, and methods of using the same for substrate processing chambers. In one implementation, a pedestal for disposition in a substrate processing chamber includes a body. The body includes a support surface. The body also includes a stepped surface that protrudes upwards from the support surface. The stepped surface is disposed about the support surface to surround the support surface. The stepped surface defines an edge ring such that the edge ring is integrated with the pedestal to form the body that is monolithic. The pedestal also includes an electrode disposed in the body, and one or more heaters disposed in the body.