The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2024
Filed:
Aug. 27, 2019
Applicant:
Tdk Corporation, Tokyo, JP;
Inventors:
Assignee:
TDK CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C01B 21/082 (2006.01); C01G 35/00 (2006.01); C23C 14/06 (2006.01); H01G 4/12 (2006.01); H01G 4/30 (2006.01); H01G 4/33 (2006.01); H01L 49/02 (2006.01); H05K 1/16 (2006.01);
U.S. Cl.
CPC ...
C01B 21/0821 (2013.01); C01G 35/006 (2013.01); C23C 14/0676 (2013.01); H01G 4/1218 (2013.01); H01G 4/1254 (2013.01); H01G 4/306 (2013.01); H01G 4/33 (2013.01); H01L 28/40 (2013.01); H05K 1/162 (2013.01); C01P 2002/72 (2013.01); C01P 2006/40 (2013.01);
Abstract
A capacitive element and a dielectric thin film having a small dielectric loss and a large relative permittivity, particularly at low frequencies. [Solution] This dielectric thin film includes an A-B—O—N oxynitride. When the A-B—O—N oxynitride is represented by the compositional formula ABON, (o+n)/a<3.00 is satisfied.